High Temperature 1200 Dual Zones Sliding CVD Tube Furnace

model

TMAX-1200-1200-C-I

TMAX-1200-1200-C-II

TMAX-1200-1200-C-Ⅲ

power

3 kw

3 kw

4 kw

Tube size

60 (OD) X1800mm Dia

80 (OD) X1800mm Dia

100 (OD) X1800mm Dia

Overall dimensions(LXDXH)

1500X450X600

1500X450X600

1500X510X650

The power supply voltage

220 v

Sliding mode

stainless steel rolling bearing

Number of phase

Single phase

Heating element

Import Swedish Canthal A1 resistance wire click into data download

The control mode

Using the yu electric program control thermometer (standard)
1. 30 program control temperature intelligent PID adjustment.
2. The heating circuit of the electric furnace can be automatically cut off when it has been protected by warm or broken accidentally. (when the furnace temperature exceeds 1200 degrees or the thermocouple is broken, The ac relay ON the main circuit will be automatically disconnecting, the main circuit is broken, the light ON the panel is out, OFF the light, the limited protective electric furnace.
3. With 485 communication interface (standard and standard for choosing software)
4. It has the function of power failure protection, that is, when the power is off, the program will not start up from the beginning temperature, but the furnace will start to rise when the power is off.
The instrument has the function of temperature self-setting

 (to replace the imported instrument, we need to pay another fee.)

FP93 temperature control table(SHIMADEN)       European instruments                        

Touchscreen instrument

The temperature control mode

PID

Broken even protection and display

Yes

Over temperature protection

Yes

Over current protection

Yes

Control precision

+ / - 1 ℃

The trigger

Phase shift trigger

Electrical appliances

Zhejiang chint

Silicon controlled rectifier

106/16e west gate, Germany

The highest temperature

Temperature Zone1: 1200 ℃ temperature zone 2:1200 ℃

The rated temperature

Temperature Zone1: 1100 ℃ temperature zone 2:1100 ℃

Heating rate

The 20 ℃ / Min or less (can modify according to the requirement)

Recommended heating rate

10 ℃ / Min or less

Model of thermocouple

Zones 1: temperature range of K type 2: K type

Heating length

Zones 1: temperature range of 200 mm. 2:200 mm

Electrical certification

CE

Surrounding surface temperature

45 ℃ or less

Rf power supply

 (plasma generator)

Main parameters of GX gas supply system

mass flowmeter
The standard range
Using the proton flow controller 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10 SLM
(you can choose the range of the range and the type of the gas)
Maximum working pressure 3 mp
The accuracy of Plus or minus 1.5%
The pressure drop < 0.01 mpa < p = "" >
Repeat accuracy Plus or minus 0.2% F.S

Channles:

1, 2, 3, 4, 5, 6, 7, 8 (optional )

Joint type

Double cassette stainless steel connector

System work pressure range

0.1 ~ 0.5 MPa

Working temperature

5-45 ℃

Pressure vacuum watch

0.1 ~ 0.15 MPa to 0.01 MPa/case

Static mixing chamber

Dia50 X 400 mm

interface

Dia6 1/4"

The power supply

220 v

size

600 x600x600

Corrugated pipe

KF25X1000mm

The vacuum degree can be reached with this system

10-1 the pa

Vacuum baffle valve

KF25

VRD to 8 vacuum pump

model

VRD to 8

Limiting partial pressure

5 x10-2 Pa

Inlet exhaust interface

KF25

Motor speed

1440 RPM

Extraction rate

2.2 L/S

Motor power

0.4 KW

Perfeer ACP1 Oil-free multi-stage roots pump (plan 2)

Model

ACP15

Power supply

AC100 ~ 240V 50/60hz

Power

450 w

Exhaust interface

KF25

Weight

25 kg

The maximum helium leakage rate is

5 · 10-8 Pa m3 / s

Extreme vacuum degree

0.02 Torr

The extraction rate is

14 m3 / h

model

ZDR - 1

power

25 w.

Vacuum degree measurement range

0.1-10 5 Pa

Resistance silicon

What ZJ had to 52 t

Sweden (INFICON) Pirani capacitance vacuum meter (optional)

model

PCG554

Input voltage

24V 1A DC (equipped with 220V transformer)

Vacuum gauge interface

KF16

Digital display

Digital display (screen size 20x14mm), whose data display unit is torr

Product size

46mm x 28mm x 126mm (L x W x H)

The weight of the

5 LBS

Detection of gas

Various gases can be detected including mixed gases, accurate and repeatable.

Whether the anti-corrosion

Corrosion protection

The response time

30 ms or less

Measuring range

3.8 x10-5-1125 Torr.

Molecular pump unit (optional)

Unit input voltage

380 v / 220 v

Corrugated pipe

KF40X1000

Vacuum baffle valve

KF40

Case size

600 x600x600

Molecular pump

Molecular pump model

FJ620

Input voltage

380 v

Molecular pump inlet flange

DN160

Molecular pump pumping rate L/S (for air)

600

Molecular pump limit pressure (Pa)

6 x 10-7

Cooling system

Water cooled

Cooling water pressure (MPa)

0.1 to 0.2

Cooling water temperature

< 25 ℃ < p = "" >

The environment temperature

0 ~ 40 ℃

Suggested starting pressure

< 100 pa < p = "" >

Engine vacuum pump RVP - 6

power

0.75 KW

voltage

380 v

speed

1450 RPM

Inlet diameter

KF25 / KF40

Pump pumping rate (L/S)

6

Ultimate pressure

4 x10-2 pa

German Pfeiffer vacuum pump

voltage

220 v

power

110 w.

Extraction interface

KF40

The weight of the

150 kg

Pump speed of the front pump

0.9 m 3 / h

Extraction rate (N2)

33 m/S

Compound vacuum gauge

Compound vacuum gauge model

ZDF

The power supply

220 v 55 w

Control precision

Plus or minus 1%

Vacuum gauge measurement range

10-5-10 5 Pa