MFC1000 gas Mass Flow Controller

Parameter

MFC1000-100sccm

MFC1000-1000sccm

MFC1000-20SLPM

Unit

Flow range

100sccm

1000sccm

20SLPM

Precision(Under calibration condition)

±(1.5+0.5FS)

%

Repetitive

±0.5

%FS

Zero drift (full range drift)

0.05

%FS/year

Working range/Span ratio

100:1

100:1

Maximum controllable flow

102

%FS

Typical response time

100

ms

Starting preheating time

70

ms

Working temperature

0~+50

℃

Slow range pressure loss (exhaust to atmosphere)

150

800

2000

Pa

Size

63.5x66.5x22.2

70.5x74.2x26.0

mm³

Pipe connection interface

1/8"NPT (nut)

3/8"NPT(nut)