High Temperature CVD 1200C 1400C 1600C 1700C 1800C Vertical Sliding Rotary PECVD Tube Furnace Machine

Product Overview

Description

High Temperature CVD 1200C 1400C 1600C 1700C 1800C Vertical Sliding Rotary PECVD Tube Furnace 

 

 

Specifications

LITH-1200PECVD Chemical Vapor Deposition (CVD) and Plasma-Enhanced Chemical Vapor Deposition (PECVD) multi-zone split tube furnaces feature the famous (Sweden) wire heating elements embedded in high quality Mitsubishi® (Japan) alumina fiber insulation. All steel dual-layer housing ensures durability and helps minimize heat loss to exterior surface.

Furnace operation is controlled by Shimaden® (Japan) 40-segment digital controller with built-in RS485 digital communications port and USB adaptor, allowing the user to connect to a PC for remote control and monitoring of the furnace. You can also save or export test results.

All our furnaces are CE compliant.

 

Features

1. Compact, portable and lightweight design.

2. Lower processing temperatures required compare to conventional CVDs.

3. Film stress can be controlled by high/low frequency mixing techniques.

4. Split furnace chamber for fast and easy tube access.

5. Standard package includes set of stainless steel vacuum sealing flanges with valves and pressure meter.

6. Microprocessor based self-tuning PID control provides optimum thermal process with minimal overshoot.

7. Multiple atmosphere processes in a single cycle are possible (ex: binder burn out in air and parts sintering under rough vacuum or inert gas environment.)

8. Built-in amp meter and dual voltmeters for easy monitoring and troubleshooting.

9. Built-in computer interface.

10. Long life type K thermocouple.

11. Slidable furnace option gives you ultra fast cooling rates

Safety

1. Overheat protection shuts down the furnace if temperature is outside of acceptable range (refer to controller's manual) or when the thermocouple is broken or malfunctions.

2. Power failure protection resumes furnace operation right after the point of failure when power is reestablished.

Warning! NEVER fill furnace with explosive gases, including Hydrogen, Carbon Monoxide and Methane.

 

Furnace, Vacuum Pump and Gas Mixing System Specifications

 

RF Generator Specifications