Small size 1 to 6 ways piezo linear stage driven by piezo actuator for Nanometer cutting platform Piezo Nanopositioning Stage

Models

 S-Closed loop

K-Open loop

P63.X7S

P63.X7K

P63.Z7S

P63.Z7K

P63.XY7S

P63.XY7K

P63.XZ7S

P63.XZ7K

P63.XYZ7S

P63.XYZ7K

Units

Active axes

X

Z

XY

XZ

XYZ

Travel range(0~120V)

5.5

5.5

5.5

5.5

5.5

μm±20%

Travel range(0~150V)

6.8

6.8

6.8

6.8

6.8

μm±20%

Integrated sensor

SGS/-

Closed/open loop resolution

0.2/0.1

nm

Closed-loop linearity

0.2/-

%F.S.

Repeatability

0.1/-

0.15/-

%F.S.

Stiffness

1.5

2

X1.2/Y1.4

X1.2/Z1.5

X0.9/Y1/Z1.2

N/μm±20%

Unloaded resonant frequency

2

2.5

X1.3/Y1.9

X1.5/Z1.6

X0.9/Y0.95/Z1.2

kHz±20%

Load capacity

0.8

0.8

0.5

0.5

0.4

kg

Electrical capacitance

0.8

0.8

0.8/axis

0.8/axis

0.8/axis

μF±20%

Material

Aluminum

Mass

70

70

120

120

160

g±5%