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Model | VMS-3020E | VMS-4030E | VMS-5040E | ||||
Worktable | Worktable D(mm) | 500*330 | 606*466 | 706*566 | |||
Glass Table Size(mm) | 350*280 | 450*350 | 550*450 | ||||
X,Y Stroke(mm) | 300*200 | 400*300 | 500*400 | ||||
Load Capacity | approx. 20 kg | approx. 30 kg | approx. 35 kg | ||||
Resolution | 0.5μm | 0.5μm | 0.5μm | ||||
Accuracy E1* | Ex, y ≤ (3.0+L/200) μm | ||||||
Accuracy E2* | Exy ≤ (3.5+L/300) μm | ||||||
Accuracy E3* | Ez ≤ (3.5+L/150) μm | ||||||
Z Stroke (mm) | Standard | 200 | |||||
Instrument Weight (kg) | 250 | 325 | 500 | ||||
Dimension (mm) | 610*764*992 | 720*950*1020 | 800*1040*1020 | ||||
Motor | Three-axis Max. Velocity | X,Y: 400mm/s Z: 200mm/s | X,Y: 400mm/s Z: 200mm/s | ||||
Three-Axis Positioning Accuracy | 0.001mm | ||||||
Imaging System | Camera | 2 MP Color Camera | |||||
Zoom Lens | optical manual zoom lens | ||||||
Zoom Lens Magnification | 0.7-4.5X | ||||||
Video Magnification | 28-186X | ||||||
FOV | 11.1-1.7mm | ||||||
Power Consumption | 600W | ||||||
Instrument Accessories | 1X Tube (standard) | 0.5X Tube (optional) | WD | ||||
Zoom Lens | 0.7-4.5X | 0.7-4.5X | |||||








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