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Высококачественный галокарбон 41 CAS #593 53 3 метилфторид CH3F газ R41
- Категория: >>>
- Поставщик: Wuhan Air Gas Electronic Materials Enterprise Co. Ltd.
Сохранить в закладки 11000008337239:
Описание и отзывы
Характеристики
Products Description
High Purity Gases For Electronics Monofluoromethane 99.999% FC41 UN 2454 Halocarbon 41 Methyl Fluoride CH3F
AGEM produce and sell high-purity Monofluoromethane gas (CH3F) to be used in the manufacturing process of semiconductor chips.
Fluoromethane, also known as methyl fluoride, Freon 41, Halocarbon-41 and HFC-41,is a non-toxic, liquefiable gas at standard temperature and pressure. It is made of carbon, hydrogen, and fluorine. The name stems from the fact that it is methane (CH4) with a fluorine atom substituted for one of the hydrogen atoms. It is used in semiconductor manufacturing processes as an etching gas in plasma etch reactors.
Fluoromethane, more commonly called methyl fluoride (MeF) or Halocarbon 41 is a non-toxic liquefiable gas used in the manufacture of semiconductor and electronic products. In the presence of a RF field it dissociates into fluorine ions for selective etching of silicon compound films.
Product Name : | Methyl fluoride | Purity: | 99.9~99.999% |
CAS No.: | 593-53-3 | EINECS No.: | 209-796-6 |
MF: | CH3F | Molar mass: | 34.03 g/mol |
UN No.: | 2454 | Hazard Class : | 2.1 |
Appearance: | Colorless | Odor: | pleasant, ether-like odour at high concentrations |
Inspection item | Requirement | Inspection result |
Purity | 99.99 | 99.995 |
O2 | ≤20 ppbv | ≤5 ppbv |
N2 | ≤70 ppbv | ≤20 ppbv |
CO2 | ≤10 ppbv | ≤10 ppbv |
CO | ≤10 ppbv | ≤10 ppbv |
CH4 | ≤5 ppbv | ≤5 ppbv |
H2O | ≤10 ppbv | ≤2 ppbv |
Application:
CH3F is a specialty gas used in the manufacturing process of semiconductor chips for micromachining nitride film by etching. CH3F is mainly used in the manufacture of semiconductor memory chips including NAND flash and DRAM that requires micromachining technology. Since its etching selectivity is higher than those of other gases, CH3F is suitable for micromachining of multi-layer structure of 3D NAND flash. The demand for CH3F has been increasing these days due to start-up of many lines to manufacture 3D NAND flash.
Packaging & Delivery
DOT Name: | Methyl fluoride |
DOT Level: | 2.1 |
DOT Label: | 2.1 gas |
UN NO.: | UN2454 |
CAS No.: | 593/53/3 |
CGA/DISS/JIS: | 350/720 &724/W22-14L (Other valve types can be used) |
Transportation status: | Liquefied gas |
Typical Package Sizes: | 3/7/18kg (Accept customer provided cylinders) |
CAS Number | 593-53-3 |
FAQ
FAQ
1. What is the MOQ?
A: From one cylinder
2. What is the delivery time?
A: 7-10 days Exwork after we receive the deposit, After we order shipping air shipping, we could know the total time to do delivery to customers country.
3. How do check the gas quality?
A: Firstly, our team will do cylinders treatment(cleaning, drying, vacumm, pumping and replacement before filling the gas to ensure the cylinder inside is clean and dry)
Secondly, we will test treated cylinders again to make sure the cylinder inside which is clean and dry.
Thirdly, we will analyze the gas after filling into the cylinders and provide it with COA(Certificate of Analysis)
4. Does all cylinders can be recyclable?
A: Usually the working life of seamless steel cylinders is more than 20 years, The disposible cylindes can be used for only one time.
5.Can we send cylinders back to China and to refill gas?
A: Yes, when your company run out of gas, you could send back the empty cylindes and refill the gas. You just need to inform us before your export, we will handle the cylinders customs cleanrance in China.
6.Cylinders and Valve standard Available
A: Cylinder DOT-3AA ISO9809, GB5099, TC-3AAM. EN1964, KGS VALVE: DISS, CGA, DIN, BS, AFNOR, JIS.
7.Can I do LCL with my other common cargo?
A: Our products belong to 2.2 level DG cargo and should shipping with DG cargo, if shipping as common cargo, it is inlegal, we should order DG cargo from shipping company, if you have other common products, you could put into the cargo and send as DG cargo.
1. What is the MOQ?
A: From one cylinder
2. What is the delivery time?
A: 7-10 days Exwork after we receive the deposit, After we order shipping air shipping, we could know the total time to do delivery to customers country.
3. How do check the gas quality?
A: Firstly, our team will do cylinders treatment(cleaning, drying, vacumm, pumping and replacement before filling the gas to ensure the cylinder inside is clean and dry)
Secondly, we will test treated cylinders again to make sure the cylinder inside which is clean and dry.
Thirdly, we will analyze the gas after filling into the cylinders and provide it with COA(Certificate of Analysis)
4. Does all cylinders can be recyclable?
A: Usually the working life of seamless steel cylinders is more than 20 years, The disposible cylindes can be used for only one time.
5.Can we send cylinders back to China and to refill gas?
A: Yes, when your company run out of gas, you could send back the empty cylindes and refill the gas. You just need to inform us before your export, we will handle the cylinders customs cleanrance in China.
6.Cylinders and Valve standard Available
A: Cylinder DOT-3AA ISO9809, GB5099, TC-3AAM. EN1964, KGS VALVE: DISS, CGA, DIN, BS, AFNOR, JIS.
7.Can I do LCL with my other common cargo?
A: Our products belong to 2.2 level DG cargo and should shipping with DG cargo, if shipping as common cargo, it is inlegal, we should order DG cargo from shipping company, if you have other common products, you could put into the cargo and send as DG cargo.
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