6 120 кВт DC импульсный магнетронный распылитель питания для вакуумного покрытия

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Характеристики


6-120kW DC Pulse Magnetron Sputtering Power Supply For Vacuum Coater


 


 



Pulse Bias Power


ZY-Bias Bipolar Pulse Bias Power Supply


 


400


Technical characteristics



  • This type of power supply provides high-precision constant voltage output, micron arc detection time, and bipolar output active arc extinguishing

  • This model is mainly used for glow discharge cleaning of the substrate surface, ion bombardment before coating, and ion acceleration during vacuum deposition


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Specifications:















































































Items



Parameters



Power



18KW



Input voltage



380-410Vac 3P+PE



Input frequency



47-64HZ



Work mode



Constant voltage



Max. output voltage



1000V



Max. output current



15-60A



Output frequency arc detection time



10-100KHZ



Pulse interval time



1 – 10μs



Output mode



Positive and negative pulse/DC



Reverse pulse



Negative pulse 15%



Arc suppression method



Proactive



Arc detection time



<2μs



Residual arc energy ARc



<0. 3mJ/ kW



Communication Interface



Modbus analog ProfiBus



Size(19’’ Chassis)



7U-  311X480 X600mm(HWD)



Cooling method



Forced air cooling



Weight



70Kg



 






Company Information


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Hunan Zhongyuan Technology Co., Ltd was established in 2001. Zhongyuan is a Hi-Tech enterprise which integrating developments, production and sales. Its products own more than 10 national patent and software copyright.


 


Zhongyuan specializes in providing the complete solution of related field power supply and control system by owning technologies of the copyright of high frequency switch power supply, high voltage impulse power supply, auto control system, and it is based on plasma application technology research production from Zhongnan College, with the breakthrough of plasma technology application field. We specialize in new technique and new products developing, custom made special model.


 


Zhongyuan has developed all series inverter vacuum coating supply(bias, magnetron sputtering, arc and ion supply), micro-arc oxidized supply, air purified supply and varies of high frequency & high voltage impulse supply. They are widely applied to: solar energy coating, ITO, LOW-E, high reflection, tooling coating, special LCD coating, scientific research, electronic components, optical and decorative field coating.


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FAQ


Q1: What is your MOQ?


A1: One set.


 


Q2: Is OEM/ODM available?


A2: Yes. Our products can be customized.


 


Q3: How long is your delivery time?


A3: It depends on your order quantity and generally it takes about 20-30days.


 


Q4: Which market do you usually sell?


A4: Middle East, Afica, Europe, Asia,etc.


 


Q5: How long is the warranty?


A5: Within one year from sale date.





Contact Zhongyuan


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