Двойные Магнетронные системы

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Характеристики


Dual Magnetron Sputtering Power Systems


 


 



MF Power Supply


5


ZY-PEII Series Sine Waveform Medium-Frequency Power Supply


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Technical characteristics



  •  Pure sine wave output, low harmonics; high ionization rate

  •  Excellent current and voltage arc suppression management system

  •  Residual arc energy ARC <0.5mJ/kW, good quality of coatings


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Specifications:











































































Items



Parameters



Power



5-15KW



Input voltage



380-410Vac 3P+PE



Input frequency



47-64HZ



Work mode



Constant power/constant current/constant voltage



Max. output voltage



1200V



Max. output current



15-50A



Output waveform



Sine wave



Output frequency



40KHZ +0. 01%



Pulse output



Support



Load matching



Ultra-wide load matching capability (5-200)



Residual arc energy ARC



<0. 5mJ/kW



Communication Interface



Modbus analog ProfiBus



Size(19’’ Chassis)



4U     177x480x644mm(HWD)



Cooling method



Fully sealed water cooling



Cooling water temperature(°C)



+25 to +35



Weight



48Kg






 



Company Information


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Hunan Zhongyuan Technology Co., Ltd was established in 2001. Zhongyuan is a Hi-Tech enterprise which integrating developments, production and sales. Its products own more than 10 national patent and software copyright.


 


Zhongyuan specializes in providing the complete solution of related field power supply and control system by owning technologies of the copyright of high frequency switch power supply, high voltage impulse power supply, auto control system, and it is based on plasma application technology research production from Zhongnan College, with the breakthrough of plasma technology application field. We specialize in new technique and new products developing, custom made special model.


 


Zhongyuan has developed all series inverter vacuum coating supply(bias, magnetron sputtering, arc and ion supply), micro-arc oxidized supply, air purified supply and varies of high frequency & high voltage impulse supply. They are widely applied to: solar energy coating, ITO, LOW-E, high reflection, tooling coating, special LCD coating, scientific research, electronic components, optical and decorative field coating.


QQ20200430092626


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FAQ


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Q. How is your company's product after-sales service system?


A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.


Q. How long is your delivery time? If I want to customize the instrument, how long does it take?


A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 20-30 days depending on the specifications of the custom instrument.


Q. Our country's power supply and plug are different. How do you solve it?


A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.


Q. How is the package of goods? Delivery methods?


A.1. Standard export fumigation sign wooden box packaging
2. Express, air, sea shipping according to customer requirements, find the most suitable way.





Contact Zhongyuan


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