Мини плазменный распыление машина для нанесения покрытия с вакуумным насосом и золота TCH GSL 1100X SPC12

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Mini Plasma Sputtering Coater with Vacuum Pump & Gold Target TCH-GSL-1100X-SPC12 

Product Description

 

TCH-GSL-1100X-SPC12 is a compact plasma sputtering coater designed for making metallic coatings, such as gold, platinum, Indium and silver etc. Especially for coating conductive gold film for SEM sample. The plasma sputtering coater is shipped with all necessary accessories for immediate use, including one sputtering head with gold sputtering target (gold cathode), vacuum pump, stainless steel bellows and quick clamps.

 

Specification of the Mini Plasma Sputtering Coater:

Input Power

Single phase 208 - 240 VAC, 50 / 60 Hz

< 1000 W (including vacuum pump)

Vacuum Chamber

Vacuum chamber: 100 mm ID x 130 mm H, made of fused glass

Sealing flange made of stainless

Needle valve on front panel for gas flow control

Sample Stage

Stage size: 40 mm Dia.

Sputtering distance range: 15 - 80 mm adjustable

Control Panel

Vacuum gauge and sputtering current meter for monitoring deposition

Needle valve on front panel for gas flow control

Sputtering timer: 0 - 110 s adjustable

Vacuum Pump

(optional)




 

156 L/m Double Stage Rotary Vane Vacuum Pump with vapor trap (Max vacuum 1.0E-2 Torr)

Stainless steel bellows with KF16 adapter and quick clamps

Two Stage Exhaust Filter on vacuum pump to eliminate oil vapor contamination

One High purity Au target (57 mm Dia. x 0.12 mm, 4N purity) included.

Note:  you may use a turbo pump to achieve 1.0E-5 Torr vacuum by a turbo pump (please order with extra cost)

Sputtering Targets

Target size requirements: 57 mm Dia. x 0.5 mm max

4N purity gold foil: 57 mm Dia. x 0.12 mm (Included and pre-installed on coater)

 

Optional Targets are available (Contact to order)

Au target (57 mm Dia. x 0.12 mm, 4N purity)

Pt target (57 mm Dia. x 0.12 mm, 4N purity)

Ag target (57 mm Dia. x 0.5 mm, 4N purity)

Size

480 mm L x 320 mm W x 280 mm H

Net Weight

20 kg

Shipping Weight

55 kg (120 lbs) with 1020 mm x 790 mm x 560 mm

Compliance

CE approval

Warranty

One year limited warranty with lifetime support

 

reference of the Mini Plasma Sputtering Coater

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other related products for your choice

single target coater.jpg

Company Information

Zhengzhou TCH Instrument Co., Ltd. is established with the goal of providing researchers with specialized instruments designed to meet their unique demands. We has grown into one of the material science market’s sources of quality instruments overseas. Although the work of the research community has changed quite a bit over the last years,Zhengzhou TCH Instrument Co., Ltd , through constant innovation, continues to provide the highest-quality instruments and unparalleled service, to meet and exceed all of our customers’ needs.

Zhengzhou TCH Instrument Co., Ltd is a leading developer of lab instruments and related products. Our products are used by lab research professionals worldwide. Throughout our history Zhengzhou TCH Instrument Co., Ltd has been synonymous with quality.

Contact Email: tchinstrumenttch(at)163.com

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