Двухцелевое РФ магнетронное распылительное покрытие с двумя толщиномерами для покрытия диэлектрической пленки

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Dual-target RF magnetron sputtering coater with two film thickness gauges for coating dielectric films



Product Description


Dual-target RF magnetron sputtering coater is a cost-effective magnetron sputtering coating equipment independently developed by our company. It is standardized, modular and customizable. There are 1-inch or 2-inch magnetron targets for you to choose. Customers can choose the target according to the size of the substrate to be coated. The device is equipped with 300W RF power supply and 500W DC power supply. The DC power supply can be used for the preparation of metal film, and the RF power supply can be used for the preparation of non-metal films. The two targets can meet the needs of multi-layer coatings. If customers have other coating needs, DC power supply and pulse power supply can be customized. Various types of power supply are available from 300W to 1000W in various specifications.




The coating machine has a two-channel high precision mass flow meter. If customers have other requirements, the gas channel of up to four-channel mass flow meter can be customized to meet the complex gas environment requirements. The instrument is equipped with advanced turbo molecular pump group, and ultimate vacuum is up to 1.0E-5Pa, and other types of molecular pumps are available for purchase.


In addition, this machine is equipped with two high precision film thickness gauges, which can meet the film thickness detection requirements during the coating process. If customers need to install multiple film thickness gauges, also can contact our technical staff for customization.


This product can be equipped with an integrated industrial computer to control the system. In the computer program, most functions such as vacuum pump control and sputtering power control can be realized, which can further improve your experimental efficiency.


Technical parameters of magnetron sputtering coating machine:


































































































Sample stage



Size



φ185mm



Temperature control accuracy



±1℃



Heating temperature



Max 500



Rotate speed



1-20rpm adjustable



Magnetron Sputtering   target head



Quantity



2”×2 (1”,2” optional)



Water chiller



Circulating water chiller   with flow rate of 10L/min



Cooling mode



Water cooling


  

Vacuum chamber



Chamber size



φ300mm×300mm



Watch window



φ100mm



Chamber material



Stainless steel



Opening mode



Top cover open



Mass flowmeter



2 channels; measuring range 100sccm; 100sccm (can be customized according to customer needs)



Vacuum system



Model



CY-GZK103-A



Pumping interface



KF40



Molecular pump



CY-600



Exhaust interface



KF16



Backing pump



rotary vane pump



Vacuum measurement



Compound vacuum gauge



Ultimate vacuum



1.0E-5Pa



Power supply



AC;220V 50/60Hz



Pumping rate



Molecular pump:   600L/S   rotary vane pump: 1.1L/S  


Comprehensive gas pumping performance:   vacuum up to 1.0E-3Pa in 20 minutes



Power configuration



Quantity



RF power supply×2



Max output power



RF 300 W



Other parameters



Supply voltage



AC220V,50Hz



Overall size



600mm×650mm×1280mm



Total power



2.5KW



Total Weight



About 300kg



 


Application of magnetron sputtering coating machine


This device can be used for preparing single-layer or multi-layer ferroelectric thin films, conductive films, alloy films, semiconductor films, ceramic films, dielectric films, optical films, oxide films, hard films, PTFE films, and the like. Compared with similar equipment, the dual-target magnetron sputtering coater is not only widely used, but also has the advantages of small size and easy operation, and is an ideal equipment for preparing material films in a laboratory.


 


More photos magnetron sputtering coating machine


2RF sputtering coater2.jpg



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Company Introduction



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Founded in 2005, Zhengzhou CY Scientific Instrument Co., Ltd. is a company specializing in the development and production of laboratory technology research equipment. The products are mixed, pressed, burned, cut, ground, polished, coated, analytical equipment and related consumables. Products include laboratory sintering equipment, coating equipment and so on. At present, it has been exported to 25 countries and regions such as the United States, Europe, and Southeast Asia, and has been well received by various scientific research units.


 


We have a mature technology research and development team, the number of technicians is 33, the company has 150 people, more than 500 square meters of office space, the factory covers an area of about 1,500 square meters located in Zhengzhou High-tech Zone Electronic Industrial Park. The products are mainly located in the research market, serving scientific research in the labs of universities and colleges, and can also customize products according to your needs.


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Package



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FAQ



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Q. Are you a manufacturer or a trading company?


A. We are professional laboratory instrument manufacturers, have their own design team and factory, have mature technical experience, and can guarantee the quality of products and the optimal price.


 


Q. How is your company's product after-sales service system?


A. The product warranty period is 12 months, we can provide lifetime maintenance. We have professional pre-sales and after-sales departments that can respond to you within 24 hours to resolve any technical issues.


 


Q. How long is your delivery time? If I want to customize the instrument, how long does it take?


A.1. If the goods are in stock, it is 5-10 days. 2. We can provide customized services for our customers. It usually takes 30-60 days depending on the specifications of the custom instrument.


 


Q. Our country's power supply and plug are different. How do you solve it?


A. We can supply a transformer and plug according to your local requirements according to the power plug of different countries.


 


Q. How to pay?


A.T / T, L / C, D / P, etc., it is recommended to use Alibaba Trade Guarantee.


 


Q. How is the package of goods? Delivery methods?


A.1. Standard export fumigation sign wooden box packaging 2. Express, air, sea shipping according to customer requirements, find the most suitable way.


 


More questions, please contact customer servicetube furance





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