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RU2 Reader Performance | ||
Resolution ratio | Digital1um,0.5um,0.2um,0.1um,20nm,50nm | |
Simulation 20um | ||
Minimum clock frequency of counter | Minimum clock frequency of counter | |
Maximum speed | 12m/s Relating to resolution and minimum clock frequency of counter | |
Electronic subdivision error | 40nm | |
Automatic gain control | Yes | |
Automatic correction | Yes |
Specifications | Coefficient of thermal expansion | 10.5um/m/℃ | ||
Grating Ruler Type | Incremental type | Weight | 12.6 g/m | |
Pitch | 20um | Material | High Strength Stainless Steel | |
Precision | ±5um/m | Environmental requirements | ||
Linearity | ±2.5um/m Two-point correction is possible | working temperature | 0℃~70℃ | |
Size | H 0.2mm * W 8mm | Working humidity | RH < 95% (Non condensation) | |
Size of gum | H 0.1mm * W 6mm | Storage temperature | -20℃~70℃ | |
Supply length | 100mm~50m | Storage humidity | RH < 95% (Non condensation) |
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