Economical high vacuum compound molecular pump for MPCVD/PECVD and other systems

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Product Overview

Description


Turbomolecular pump


 


Vacuum furnace, coating, vacuum filling equipment, vacuum exhaust station, space environment simulation equipment, etc.


Specification  


















































































Model



F-400/3600E



Pump Speed(l/s,Air)



3600



Inlet flange



DN 400 ISO-K



Outlet flange



KF100(DN)



Compression Ratio



N2:10^7



Ultimate Vacuum(Torr)



≤ 4.5x10-8(DN40 ISO-KF)



Ultimate Vacuum(Pa)



≤ 6x10-6(DN40 ISO-KF)



Rotation Speed(rpm)



15300



Run-up time(sec)



< 15.5



Bearing type



Ceramic



VIB(um)



≤ 0.5



Backing pump(l/s)



30



Cooling method,optional



water



Cooling Water Temperature()



≤25



Bake-out temperature()



≤90



Ambient Temperature()



5-40



Lubrication



Oil



Mounting or ientation



Vertical ±5°



Weight



130kg



 


Packaging & Shipping



Our Services


1.We are a manufacturer so that we have the punctual delivery time.


2.One sales representative serves you from inquiry to products shipped out.Communicate directly and conveniently.


3.Professional R&D team.


4.Strict QC.


5.Smooth shipping.


6.Rich experience. We do OEM services.Our customers are all over the world like USA, UK, Russia, Korea, Southeast 


Asia, etc. so that we are quite experienced.


7.Certificate: All our products are CE approval.


8.Fast reply: Our team will respond your requests within 8-working-hour


 


Company Information


 Zhengzhou TAINUO Film Materials Co., Ltd is mainly engaged in the research and development, design, manufacturing and sales of equipment used in scientific researches. Independence and innovation is the company's tenet.Our main products include: tube furnace, muffle furnace, plasma cleaner, vacuum furnace, atmosphere furnace,CVD system and customized lab equipment.Welcome you come to visit us.


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Contact us:
Zerlinda


 


 


0.0092 s.