LONG85 L360 линейный двигатель, применяемый в полупроводниковом оборудовании

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LONG85-L360 Linear Motor Applied To Semiconductor Equipment


Linear motors’ principle is based on Lorentz force, in which the combination of electric and magnetic force on a point charge due to electromagnetic fields. (If a particle of charge q moves with velocity v in the presence of an electric field E and a magnetic field B, then it will experience a force) F=q[E+(v*B)] In addition, the use of magnet arrangement and multiple forcers can achieve multiple forcers’ independence movement on single-axis stators and without stroke restriction. Also nanopositioning control. can be easily realistic via matching the high resolution feedback system.



  1. High force density

  2. High dynamic response

  3. Lower installation height

  4. Continuous force from 103N to 1579N

  5. Peak force from 289N to 4458N

  6. Assembly total height 34mm,36mmCompany Information


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A: Generally it is 5-10 days if the goods are in stock. or it is 15-30 days if the goods are not in stock, it is according to quantity.








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A: Yes, we could offer the sample but not free








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A: Payment<=5000USD, 100% in advance. Payment>=5000USD, 30% T/T in advance ,balance before shippment.
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