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LONG85-L360 Linear Motor Applied To Semiconductor Equipment
Linear motors’ principle is based on Lorentz force, in which the combination of electric and magnetic force on a point charge due to electromagnetic fields. (If a particle of charge q moves with velocity v in the presence of an electric field E and a magnetic field B, then it will experience a force) F=q[E+(v*B)] In addition, the use of magnet arrangement and multiple forcers can achieve multiple forcers’ independence movement on single-axis stators and without stroke restriction. Also nanopositioning control. can be easily realistic via matching the high resolution feedback system.




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